File:DRIE Bosch process.png
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Summary
| Description |
English: Diagram of the Bosch process of w:Deep reactive-ion etching.
Deutsch: Verfahrensschritte DRIE
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| Date | (UTC) |
| Source | Modification of de:Bild:Verfahrensschritte-DRIE.png |
| Author | Gurgelgonzo (original), Smack (talk) (modification) |
| Permission (Reusing this file) |
Public domain |
| Other versions | de:Bild:Verfahrensschritte-DRIE.png |
Licensing
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I, the copyright holder of this work, release this work into the public domain. This applies worldwide. In some countries this may not be legally possible; if so: I grant anyone the right to use this work for any purpose, without any conditions, unless such conditions are required by law. |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 00:21, 9 January 2007 | | 172 × 637 (12 KB) | Smack | {{Information |Description= {{en|Diagram of the Bosch process of w:Deep reactive-ion etching. # Structure before etching. (a): Masking layer # Etch # Passivate # Etch # Structure after many etch steps # After stripping passivation and mask}} |Source= |
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